Semicon Monitoring

Identification and quantification of AMC compounds
Very low detection limits (ppt-range)
No external carrier gas required and no consumables; therefore low operational cost
Multiple substance classes in one solution (Total acids / Total amines / Ammonia / Total solvents / Dopants)
Real identification of particular substances.
Response time within minutes
Measuring range from 0 to 30 ppb for all substances – ppt-sensitivity!
Analysis directly in-situ in real time